시냅스이미징(주)

Measurement Principle	Resolution		Speed	Advantages/Disadvantages
Measurement Principle	Horizontal	Vertical	Speed	Advantages/Disadvantages
Laser Triangulation	5um	2um	Fast	Measurement by laser triangulation Fast measurement speed Long measurement range Low measurement resolution Specular surface hard to measure Shaded area exists
Moire (Phase Measuring Profilometry Moire)	5um	0.2um	Fast	Phase measurement by grid transfer Fast measurement speed Short measurement range Limited measurement resolution Specular surface hard to measure Shaded area exists
Confocal System (Confocal Scanning Microscope)	0.2um	10nm	Slow	Measurement by focus Slow measurement speed High measurement resolution No shaded area Translucent or specular mirror surface measurable
White Light Interferometry (White Spectrum Interferometer)	0.2um	10nm	Slow	Measurement by multiple wave length light interference Slow measurement speed High measurement resolution No shaded area Vulnerable to vibration