Wafer Probe Mark Inspection System (WAOI Master 3000) |
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| This system is optical inspection system which
inspects the pad marking and ink marking of Wafer
surface automatically. This inspection system is
composed of the wafer cassette part, wafer loading/unloading
part, high magnification vision align part, inspection
control part and inspection vision part. According
to the needs of operator, it includes the review
function to be able to review the defect inspected
by the inspection system and manual inspection function
needed for precision inspections for pattern or
pad surface in high magnification. |
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⊙ High precision inspection and safe operation
of system by high precision automatic alignment
(repetition precision: less than 2um)
⊙ High precision detection for minute pattern (about
3um detection level with application of x50 lens)
⊙ Performance of high precision inspection regardless
of Wafer Warpage
⊙ Automatic inspection and sharing the former /
latter process data
⊙ Review function for bad cell and high precision
manual inspection
⊙ Function to review and analyze the data by division,
date, time and type of defect (SPC function - option)
⊙ Adoption of best hardware specification for establishment
of high precision and powerful function and performance. |
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Items |
Specification |
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| Inpection
Device |
6",
8”, 12" wafer or wafer ring after/before singulation |
| Inspection
Items |
Auto
: Ink mark , Pad Marking etc.Manual : Fine Patern,
Ink Marking & Pad Marking etc. |
| Camera
Type |
Color
CCD Camera, 24profile/Sec |
Inspection
Time
(PM Inspection Time) |
1
hour per wafer with 500 ea Cells(Pad Marking with
Pad of 100 ea per Cell) |
| Control
Resolution |
0.5
μm (X, Y, Z, Theta) |
Accuracy
(Chuck Planarity/Temp.) |
±2㎛
(10㎛(Std), 20㎛ / Ambient to 130°C) |
| Process
Control |
SPC
Software (Option) |
| PC
(2대) |
Over
PentiumIV 2.0GHz / 512Mbyte Memory,High Performance
Graphic Card |
| Monitor
(2 대) |
Over
1024 × 768 Resolution (Touch Screen) |
| OS |
Windows
2000 or XP |
| Dimensions |
Vision
System : 1480(W) x 1300(D) x 1600(H) mmControl Box
: 600(W) x 750(D) x 1850(H) mm |
| Weight
(Cont. Box) |
1200
kgf (250 kgf) |
| Main
Power |
220
VAC (+-10%) / 60 Hz / 4 kW (Single Phase) |
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The above mentioned specification of PC is recommended
to use the system optimally. |
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The content and details of this specification may
be changed without notification to improve the performance
and quality. |
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